Semiconductors & Vacuum Products
What Is AdvanTorr Products
AdvanTorr is a brand associated with advanced vacuum technology products, primarily used in scientific research, semiconductor manufacturing, and other high-tech industries. Their products are typically involved in creating, maintaining, and measuring ultra-high vacuum (UHV) environments, which are essential in processes like thin-film deposition, surface analysis, and particle accelerators.
First Glimpse
- AdvanTorr is a top-notch trusted manufacturer of vacuum equipment, which includes an extensive selection of system components such as vacuum grade valves, flanges, fittings, adaptors, butt welds, flex hoses and chambers.
- AdvanTorr product line is produced by King Lai Hygienic (Taiwan).King Lai is a company with over 30 years of experience in providing exceptional vacuum products to a wide range of industries, including:Research institutes, semiconductor, display, LED lighting, thin filmsolar cell, and vacuum coating. This product is mainly used in thin film technologies such as evaporation, sputtering, PECVD, MOCVD, and ALD, as well as surface analysis technologies and ion implant systems.
- AdvanTorr utilizes premium-grade low carbon stainless steel for their products. As a result, lower outgassing rates are produced when compared to regular 304 stainless steel used by other suppliers. Additionally, AdvanTorr offers ‘forged’ SS316LN for those who require higher-quality materials. All manufacturing processes comply with strict ISO 9001 and ISO 14001 standards, ensuring complete material traceability and certification for outstanding quality assurance. The bored and weld flanges associated with fabrication components satisfy 3A standard tube sizes. For more information on European and Japanese standards, please refer to other sections within the catalogue.
What is Vacuum Valves?
Vacuum valves are specialized components used in vacuum systems to control the flow of gases into or out of a vacuum chamber or pipeline while maintaining the integrity of the vacuum environment. These valves are essential in various industries, including semiconductor manufacturing, material science, and research, where precise control over vacuum conditions is necessary.
Types of Vacuum Valves
1.Transfer Slit Valves
2.Mini Gate Valves
3.Smart Vacuum Gate Valves
4.Aluminium Gate Valves
5.Isolation Poppet Valves
6.Isolation Ball Valves
1. Trasnfer Slit Valve
These valves are specifically designed for applications where a transfer of substrates, wafers, or other items is required between different vacuum environments or chambers. They typically feature a slit or narrow opening that allows the item to pass through without exposing the entire chamber to atmospheric pressure.
Product Introduction
The Transfer Slit Valve (TSV), is gate-like mechanism designed to connect two sealed chambers for the purpose of transferring objects from one to the other. The TSV features single axis motion, ensuring smooth and particle-free movement with no vibration. Its ‘ARMLOCK’ motion provides a secure seal in the closed position, even in the event of power and air supply failure during operation. With a durable, maintenance-free design capable of up to 5 million cycles, the TSV is built to last. Its simple modular design also makes it easy to service if required.
Product Features
▪ Ability to remain closed against large pressure differential
▪ Maintains closed position in the event of power or air loss
▪ Vulcanized seal for maintenance-free operation
▪ >5 million cycles between maintenance
▪ Suitable for SEMI wafer processing applications up to 450mm
ARM Feature
▪ Patented mechanism ▪ Low maintenance cost ▪ No gears, no need for relocation
▪ High reliability ▪ Particle free seal
Product Applications:
▪ A critical components in semiconductor manufacturing equipment.
▪ Commonly used for wafer transfer, deposition, etching, ion implantation,and metrology applications.
▪ Provide a vacuum-tight seal to maintain the purity of the processing environment.
▪ Enable precise control of the process parameters, such as gas flow, pressure, and temperature.
▪ Essential for achieving high-quality, consistent semiconductor products.
2. Mini Gate Valves
3.Smart Vacuum Gate Valves
Lock System
Position locked when the valve is open or closed
Product Introduction
Gate valves that operate in a vacuum are primarily utilized to safeguard high vacuum pumps. Gate valves can also be used to isolate two connecting chambers in a vacuum system, allowing for maintenance or repairs to be carried out on one chamber without affecting the other. The advancements in sealing mechanisms have led to the development of the S.M.A.R.T. technology to create a superior seal and facilitate smooth, vibration-free operation. The latest generation of SMART Gate Valves are specifically designed to reduce vibration during operation, resulting in significantly fewer particles being generated. This makes them an excellent choice for vacuum systems that require a clean environment.
These valves come in two different actuator orientation options:
▪ Side-mounted manual or pneumatic actuator (SGV part codes)
▪ In-Axis option (AGV part codes), which features a vertically mounted manual or
pneumatic actuator and is ideal for applications where a small footprint is necessary
Both come equipped with the SMART lock system as standard that locks positions in open or closed.
Product Features
▪ No springs! Less wear and strain means longer life
▪ Shock free ‘soft shut’ SMART technology. The lowest vibration of any gate valve on the market
▪ Vulcanized seal for repeatable, maintenance free operation
▪ Optional welded bellows feedthrough for cleanliness and improved service life
▪ Fail safe locking mechanism. Locks in both the open and closed position
4. Aluminum Gate Valves
5.Vacuum Poppet Valves
Poppet valves are designed to control flow with a simple mechanism that opens or closes a valve by lifting a poppet (a disk or plug). Isolation poppet valves are specifically used in vacuum systems to provide a tight seal, preventing contamination between sections of the system.
Product Introduction
The Isolation Poppet Valves are designed to act as “shut-off” devices in roughing
and fore lines. They prevent the risk of contamination and back streaming in vacuum systems.
The Poppet Valves are a reliable and efficient solution and is widely used in hightech industries such as semiconductor manufacturing and analytical instruments.
Product Features
▪ Available in a wide range of sizes from ¾” to 10″ orifice.
▪ > 1 million cycles between service intervals
▪ Compact, low profile, small footprint design
▪ Actuator Options
Manual Actuator (up to ¾” to 2.0″)
Single Acting Pneumatic Actuator with spring to ‘closed’ during power / air failure (sizes 3/4” to 2.0”)
Double Acting Pneumatic Actuator (sizes 2 ½” to 10”)
▪ High purity, dry with a self-lubricating mechanism, significantly reduces particle generation
6.Vacuum Ball Valves
These valves use a ball with a hole through the middle that can be rotated to align with the flow path (open) or perpendicular to it (closed). Isolation ball valves are used for quick on/off control in vacuum systems, providing effective isolation when needed.
Product Information
Product Features
▪ Valve Body Material: 316L Stainless Steel
▪ Ideal for High or Coarse Vacuum:
4,500 Torr to 10-6 Torr
▪ Range of Sizes ½” to 4”
½” to 2” with KF Flanges or Tube Ends
2 1/2” to 4” with ISO flanges
▪ Actuation Options: Manual or Pneumatic
▪ Protects Systems from Harsh Environments
▪ Simple Valve Body Design
▪ High Chemical Resistance
What is System Components?
Product Information
King Lai has a specialized vacuum chamber department equipped with state-of-the-art manufacturing and inspection equipment. With this advanced technology, we can create vacuum chambers in a range of sizes and shapes, up to 6 meters x 2.5 meters x 1.8 meters, using highquality raw materials such as SS 304L, SS 316L, and aluminum alloy, commonly used in the fabrication of HV and UHV chambers.
King Lai offers a standard range of vacuum chambers, as well as customized designs that meet our customers’ specific requirements. Through clear and thorough communication, our team of experienced designers understands the precise needs of our clients. We maintain careful control during every production process, and conduct rigorous inspections to ensure that our vacuum chambers exceed our customer’s expectations.
1. Vacuum Chambers
Applications of Vacuum Chambers in AdvanTorr:
- Semiconductor Processing: Used in the fabrication of chips, where clean and controlled environments are critical to achieve the desired microstructures and properties.
- Thin-Film Deposition: Such as in optics and electronics, where layers of material are deposited atom by atom or molecule by molecule in a vacuum environment.
- Surface Analysis: Where the properties of materials are studied in ultra-high vacuum conditions to avoid surface contamination.
2. Vacuum
Quick Access Doors
doors come in two styles: a blank door or a door with an integrated viewport, which allows for viewing access. For applications that require higher purity and a low outgassing rate, optional high-grade SS316L material is available. This material can help maintain a high level of vacuum pressure within the chamber. This product is ideal for use in a variety of industries, including semiconductor manufacturing, materials research, and vacuum coating.
Product Features
▪ Available in a range of flange sizes with and without integrated viewport.
▪ SS304L material as standard with option for higher-grade SS316L.
▪ Precision hinged door with reliable FKM O-ring seal.
▪ CF port mounts.
▪ Can be installed in any position
3. Vacuum Viewports
AdvanTorr provides a comprehensive selection of HV and UHV viewports that serve thepurpose of process observation in the visible spectrum and optical guidance. These viewports are manufactured to the highest standards of ISO 9001-2008 in contamination-free, class 10,000 clean room environments, utilizing the finest quality materials. The majority of our viewports feature a zero-length profile, which not only offers a clear viewing angle, but also prevents the viewports from extending beyond the mounting flange, making them less vulnerable to damage.
Product Features
▪ Both HV and UHV viewports offered in a wide range of CF, KF & ISO flange sizes.
▪ Available optic material: Kodial (visible spectrum), Fused Silica (Infra-red),
Sapphire (Ultra-violet).
▪ UHV viewports offered in SS304L material as standard with option for high-grade SS316LN.
▪ HV viewports sealed via O-ring, UHV viewports vacuum brazed for high-temperature operation.
▪ Custom designs available on request.
4. Vacuum Viewport Shutters
Product Information
Vacuum Viewport Shutters are used in both HV and UHV coating applications to protect the viewport from the deposition of materials. All shutters incorporate a double-sided flange so that they can be mounted in between the chamber and viewport which they are protecting. The swing mechanism, which is operated via a magnetic rotary drive, can ‘swing’ through 0o to 90o but can easily be locked at a set angle via a thumbscrew on the back of the drive. The viewport shutter can also easily be cleaned by bead-blasting the shutter plate.
Product Features
▪ Range of CF flange sizes from 2.75” to 10” OD.
▪ Double-sided flange mount.
▪ UHV grade rotary drive with thumbscrew for discrete angle positioning.
▪ Bakeable to 250ºC.
▪ Wide range observation area.
▪ Easy installation in any orientation.
CF Flanges Fittings
AdvanTorr offers Conflat flanges in a wide range of sizes from 1.33” to 16.5” in both rotatable and non-rotatable versions. All CF flanges are compatible with other manufacturers’ standards and are available in SS304L material as standard, with an option for high-grade SS 316LN ESR. CF flanges utilize an OFHC (Oxygen Free High Conductivity) copper gasket for effective seal up to 1×10-10 Torr. Moreover, the copper gasket can sustain a temperature of up to 450°C, but reuse of copper gaskets is not recommended. For transition from UHV to HV also offers a complete range of adaptors for CF flange to KF or ISO flange. Please refer to the Adaptor section. For custom designed flanges, please contact your local representative or AdvanTorr direct.
1.CF Hardware & Seals
2. CF Flanges
CF Flanges, short for ConFlat Flanges, are a standardized type of metal sealing flange commonly used in high-vacuum (HV) and ultra-high-vacuum (UHV) systems. They are designed to create leak-tight, reliable, and durable connections between components of a vacuum system, such as vacuum chambers, pumps, valves, and instrumentation.
3.CF Fittings
CF Fittings (also known as ConFlat fittings) are a type of hardware used in vacuum systems to create secure, vacuum-tight connections between various components like pipes, tubes, and chambers. These fittings are designed specifically for high-vacuum (HV) and ultra-high-vacuum (UHV) applications and work in conjunction with CF flanges to maintain a leak-proof environment in systems where low pressures are critical.
9.CF Reducing Tees
10.CF 4-Way Crosses
11.CF 4-Way Reducing Crosses
12.CF 5-Way Crosses
13.CF 6-Way Crosses
14.CF 6-Way Cubes
KF / DN Flanges Fittings
AdvanTorr Clamp flanges are designed in accordance with the International Standards Organization (ISO) specifications and are 100% compatible with other manufacturers’ KF- ISO flange design. Standard materials include stainless steel (SS 304L and SS 316L) and Aluminum is also available upon request. KF flanges are a convenient solution for quick assembly and disassembly of vacuum components and flange connections are available in a range of tube sizes from 1/2” to 2.0”. KF flanges utilize an aluminum clamp with a single wing nut allowing frequent assembly and disassembly without the need for any tools. The 15 degree tapper surface of the flange allows uniform pressure for compressing an O-ring held in place by a centering ring. The vacuum seal can be applied up to 1 x 10-8 Torr and baked to 200°C. However, sustained baking above 200°C may result in deterioration of the elastomer seal. provides a broad range of KF adaptors for connecting to different types of flanges so please refer to the Adaptor section in this catalogue
KF/DN flanges are essential components in the construction of vacuum systems, allowing secure and efficient connections in vacuum environments. AdvanTorr likely offers these components for high-quality vacuum applications.
Cleaning and Packaging
All products with weld joints are 100% helium leak tested to assure leak free operation prior to use. In addition, to ensure the cleanliness of products, all parts are ultrasonically cleaned to HV standards using de-ionized water and packaged in contamination free, class 10,000 clean room conditions. Each bag is affixed with a barcode label identifying the component’s part number, heat number and batch number for full traceability.
ISO Flanges & Fittings
AdvanTorr ISO flanges are designed to fit tubes sizes with an OD above 2 inches and comply with the International Standards Organization specifications so are 100% compatible with other manufacturers’ flange design. There are two types of flange assemblies, claw clamp type and bolt flange type and both utilize an O-ring which is held in place by a centering ring to achieve a vacuum seal up to 1×10-8 Torr. The bolt type flanges are assembled by using a set of bolts to fix the position of the mating flanges, whereas the claw clamp flanges use double claw clamps to hold two flanges together. In addition, the use of the claw clamps means that mating flanges can be connected together in any orientation. A wide range of adaptors for connection to CF or KF flanges can be found in the Adaptor section.
In AdvanTorr, ISO flanges and fittings refer to standardized components used to create leak-tight connections in vacuum systems. These components follow international standards, particularly the ISO (International Organization for Standardization) standards, which are commonly used in vacuum technology to ensure compatibility across different manufacturers and systems.
Cleaning and Packaging
All products with weld joints are 100% helium leak tested to assure leak free operation prior to use. In addition, to ensure the cleanliness of products, all parts are ultrasonically cleaned to HV standards using de-ionized water and packaged in contamination free, class 10,000 clean room conditions. Each bag is affixed with a barcode label identifying the component’s part number, heat number and batch number for full traceability.
